Ilori, Olusoji & Osasona, O. & Eleruja, Marcus & Egharevba, G. & Adegboyega, GA & Chiodelli, G. & Boudreault, Ghislain & Jeynes, Chris & Ajayi, E.. (2005). Preparation and characterization of metallorganic chemical vapour deposited LixMoyO2 using a single source solid precursor. Ionics. 11. 387-392. 10.1007/BF02430252. Thin films of LixMoyOz have been deposited on glass substrate in a one step chemical vapour deposition using a single source solid precursor. The films were characterized using Rutherford Backscattering Spectroscopy (RBS), X-Ray Diffractometry, Scanning Electron Microscopy (SEM), Impedance Spectroscopy (IS), van der Pauw conductivity measurement and Ultraviolet-Visible Spectroscopy. Results of the characterization showed that the films are dendritic, polycrystalline and semiconducting with an optical transition energy of 3.0 eV. IS characterization gave a semicircle in the complex impedance plot. The conductivity vs. temperature plot showed a transition at 450 C and also a hysteresis. Analysis showed the film to be mixture of phases.