Preparation and characterization of MOCVD thin films of indium tin oxide
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Date
1999-11
Journal Title
Journal ISSN
Volume Title
Publisher
Optical Materials
Abstract
Indium Tin Oxide (ITO) was deposited by pyrolysis of mixed metal acetylacetonate (a single solid-source precursor). This study demonstrates that the properties of the as-deposited film depend on the deposition temperature. Films with a resistivity of , a visible transmission of over 80%, and a direct optical energy gap of 3.76 eV were deposited.
Description
International journal Optical Materials Vol13,No2,p.255-259
Keywords
metal acetylacetonate, a visible transmission, a direct optical energy gap, MOCVD thin films, indium tin oxide