Preparation and characterization of metallorganic chemical vapour deposited LixMoyO2 using a single source solid precursor
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Date
2005-09
Journal Title
Journal ISSN
Volume Title
Publisher
International journal of Ionics
Abstract
Thin films of LixMoyOz have been deposited on glass substrate in a one step chemical vapour deposition using a single source solid precursor. The films were characterized using Rutherford Backscattering Spectroscopy (RBS), X-Ray Diffractometry, Scanning Electron Microscopy (SEM), Impedance Spectroscopy (IS), van der Pauw conductivity measurement and Ultraviolet-Visible Spectroscopy. Results of the characterization showed that the films are dendritic, polycrystalline and semiconducting with an optical transition energy of 3.0 eV. IS characterization gave a semicircle in the complex impedance plot. The conductivity vs. temperature plot showed a transition at 450 C and also a hysteresis. Analysis showed the film to be mixture of phase
Description
International journal of Ionics, Volume No. 11,Issue No.5,Page No.387-392
Keywords
Scanning Electron Microscopy (SEM), metallorganic, source solid precursor, polycrystalline, hysteresis